Color online) Overview of Faraday cage angled-etching (a) 3D
Download scientific diagram | (Color online) Overview of Faraday cage angled-etching (a) 3D simulation of reactor chamber with an argon plasma and a central Faraday cage (details in text). (b) Schematic of angled-etching. The ions, directed by the equipotential on the cage boundaries, are incident upon the sample at an angle. The etch mask defines the shape of the structure. (c) Examples of different cages used for angled-etching, including (i) a triangular cage with a fine mesh (ii) a wrapped cage with a coarse mesh and (iii) a molded cage with a medium mesh, with a shape maintained by retaining plates. from publication: Faraday cage angled-etching of nanostructures in bulk dielectrics | For many emerging optoelectronic materials, heteroepitaxial growth techniques do not offer the same high material quality afforded by bulk, single-crystal growth. However, the need for optical, electrical, or mechanical isolation at the nanoscale level often necessitates the | Bulk, Dielectrics and Nanostructures | ResearchGate, the professional network for scientists.
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PDF) Faraday cage angled-etching of nanostructures in bulk dielectrics
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